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극자외선 펠리클용 나노미터 두께의 대면적 탄화 몰리브데넘 박막
- Authors
- 안진호
- Issue Date
- 20230214
- Place
- 강원도 하이원리조트
- Conference Name
- The 30th Korean Conference on Semiconductors
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)