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High Temperature Annealing Behavior of IGZO Using Plasma Enhanced Atomic Layer Deposition
- Authors
- 박진성
- Issue Date
- 9-May-2022
- Publisher
- Society of Information Display
- Citation
- SID Display Week 2022
- Conference Name
- SID Display Week 2022
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)