Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
The Impact of Oxygen Reactants on ALD InOx films using novel dimethyl[N1-(tert-butyl)-N2,N2-dimethylethane-1,2-diamine]indium precursor
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진성 | - |
| dc.date.accessioned | 2023-04-03T16:33:45Z | - |
| dc.date.available | 2023-04-03T16:33:45Z | - |
| dc.date.created | 2023-02-11 | - |
| dc.date.issued | 2022-06-28 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/183482 | - |
| dc.publisher | American Vacuum Society | - |
| dc.title | The Impact of Oxygen Reactants on ALD InOx films using novel dimethyl[N1-(tert-butyl)-N2,N2-dimethylethane-1,2-diamine]indium precursor | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 박진성 | - |
| dc.identifier.bibliographicCitation | ALD 2022 | - |
| dc.relation.isPartOf | ALD 2022 | - |
| dc.citation.title | ALD 2022 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)