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The Impact of Oxygen Reactants on ALD InOx films using novel dimethyl[N1-(tert-butyl)-N2,N2-dimethylethane-1,2-diamine]indium precursor
- Authors
- 박진성
- Issue Date
- 28-Jun-2022
- Publisher
- American Vacuum Society
- Citation
- ALD 2022
- Conference Name
- ALD 2022
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)