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Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition

Authors
박진성
Issue Date
16-May-2019
Publisher
한국재료학회
Citation
춘계재료학회
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/18445
Conference Name
춘계재료학회
Place
평창, 한국
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Park, Jinseong
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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