Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Effect of oxygen plasma power control on the Hafnium oxide thin film using plasma-enhanced atomic layer deposition
- Authors
- 전형탁
- Issue Date
- 27-May-2022
- Place
- 인하대학교
- Conference Name
- 2022년 한국반도체디스플레이기술학회 춘계학술대회
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.