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Effect of the ceria particle size on SiO2 film polishing rate by adjusting synthesis molar ratio
- Authors
- 박재근
- Issue Date
- 22-Apr-2022
- Place
- On-line
- Conference Name
- 2022 한국 물리학회
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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