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A study on the measurement of focus ring thickness in the inductively coupled plasma
- Authors
- 정진욱
- Issue Date
- 19-Aug-2022
- Publisher
- 한국진공학회
- Citation
- 제63회 한국진공학회 하계정기학술대회
- Conference Name
- 제63회 한국진공학회 하계정기학술대회
- Place
- 신화월드(제주)
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)