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Retarding field energy analyzer (RFEA) 를 이용한 유도 결합 플라즈마(ICP)에서 이온 에너지 분포 측정
- Authors
- 정진욱
- Issue Date
- 10-Feb-2023
- Place
- 웰리힐리파크(강원도 횡성)
- Conference Name
- 제64회 한국진공학회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)