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local ion density control using passive resonant antenna in an inductively coupled plasma with a bias electrode
- Authors
- 김주호
- Issue Date
- 10-Oct-2023
- Publisher
- American Physical Society
- Citation
- 76th Annual Gaseous Electronics Conference
- Conference Name
- 76th Annual Gaseous Electronics Conference
- Place
- Michigan League
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- There are no files associated with this item.
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Related Researcher
- Kim, Ju Ho
- COLLEGE OF ENGINEERING (서울 전기·생체공학부)