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Control of axial direction electron temperature distribution by gradient DC magnetic field in Inductively Coupled Plasma
- Authors
- 정진욱
- Issue Date
- 22-Aug-2023
- Place
- 신화월드(제주)
- Conference Name
- 제65회 한국진공학회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)