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changes in ion density and electron temperature over time due to bias power
- Authors
- 정진욱
- Issue Date
- 8-Nov-2023
- Place
- portland, oregon convention center
- Conference Name
- 69th American Vacuum Society
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)