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유도결합 플라즈마에서 그리드 시스템을 통한 이온 빔 특성 연구
- Authors
- 정진욱
- Issue Date
- 15-Feb-2024
- Place
- 휘닉스파크 강원도 평창휘닉스파크 강원도 평창
- Conference Name
- 제66회 한국진공학회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)