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Deep learning-based terahertz inspection technique for internal defect detection in ceramic, polymer, and metal composites used in semiconductor manufacturing process.

Authors
김학성
Issue Date
26-Oct-2023
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/199979
Place
Paradise Hotel Busan, korea
Conference Name
ISMP 2023
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서울 공과대학 > 서울 기계공학부 > 2. Conference Papers

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COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)
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