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Study of Si-based Small Molecular Inhibitor with various functional groups for Area-Selective Atomic Layer Deposition of Molybdenum Oxide
- Authors
- 박진성
- Issue Date
- 3-Apr-2023
- Place
- 인천, 대한민국
- Conference Name
- ASD Workshop 2023
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)