Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Investigation of Discrete Reactant Feeding for Atomic Layer Deposition of In2O3 Using Novel Liquid Alkyl-Cyclopentadienyl Indium Precursor.
- Authors
- 박진성
- Issue Date
- 24-Jul-2023
- Place
- Los angeles
- Conference Name
- ALD 2023
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)