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Improved Reliability of Plasma-Enhanced ALD-derived HfO2/IGZO Thin-Film Transistors

Authors
정재경
Issue Date
7-Dec-2023
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/200645
Place
TOKI MESSE Niigata Convention Center
Conference Name
IDW
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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Jeong, Jae Kyeong
COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)
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