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금속방사성폐기물 제염공정 개발을 위한 NF3 플라즈마의 코발트 산화막 식각 반응
- Issue Date
- May-2012
- Publisher
- 한국방사성폐기물학회
- Citation
- 한국방사성폐기물학회 춘계학술대회, v.10, no.1, pp 267 - 268
- Indexed
- DOMESTIC
- Journal Title
- 한국방사성폐기물학회 춘계학술대회
- Volume
- 10
- Number
- 1
- Start Page
- 267
- End Page
- 268
- ISSN
- 1738-1142
1738-4338
- Files in This Item
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Collections - 서울 공과대학 > 서울 원자력공학과 > 1. Journal Articles
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