Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Vertical structured organic-inorganic EUV photoresist fabricated by molecular layer deposition
- Authors
- 성명모
- Issue Date
- 25-Feb-2024
- Place
- 산호세
- Conference Name
- SPIE Advanced Lithography + Patterning (AL24)
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 자연과학대학 > 서울 화학과 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Sung, Myung Mo
- COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF CHEMISTRY)