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수소 환경 열처리를 통한 Ru/W 계면의 산화층 제거와 계면저항 개선
- Authors
- 안진호
- Issue Date
- 14-Feb-2025
- Place
- 강원도 하이원리조트
- Conference Name
- The 32th Korean Conference on Semiconductors
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)