DRAM capacitor용 고유전율 TIO2의 오존 농도에 따른 결정성 변화 연구

전형탁

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DRAM capacitor용 고유전율 TIO2의 오존 농도에 따른 결정성 변화 연구

Authors: 전형탁

Issue Date: 8-Jun-2024

URI: https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/208286

Conference Name: GICM 2024

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Appears in Collections: 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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