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Improving Electrical Properties of ALD SnO2 by Engineering Oxygen Vacancy and Al doping method

Authors
전형탁
Issue Date
30-May-2025
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/208291
Conference Name
한국반도체디스플레이학회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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