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Comparison of pressure dependence on electron temperature in a high density Ar/O2 inductively coupled plasma
- Authors
- 정진욱
- Issue Date
- 20-Feb-2019
- Publisher
- 한국진공학회
- Citation
- 제56회 동계정기학술대회
- Conference Name
- 제56회 동계정기학술대회
- Place
- 대명 비발디파크
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)