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Improvement of synaptic property of GeSe based CBRAM by engineering the deposition condition of switching matrix

Authors
Chung, ChulwonChoi, Changhwan
Issue Date
Aug-2024
Publisher
ELSEVIER SCI LTD
Keywords
CBRAM; GeSeS; witching matrix; Sputtering; Deposition condition; Synaptic property
Citation
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.179, pp 1 - 8
Pages
8
Indexed
SCIE
SCOPUS
Journal Title
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume
179
Start Page
1
End Page
8
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/213036
DOI
10.1016/j.mssp.2024.108471
ISSN
1369-8001
1873-4081
Abstract
A study of effect of deposition condition of germanium selenide (GeSe) switching layer to Conductive bridging random access memory (CBRAM) device property was conducted to enhance memory property and synaptic property. The devices deposited under the varied deposition conditions were analyzed by current distribution of each state (Low-resistance state [LRS], High-resistance state [HRS]), conduction mechanism analysis, chemical analysis, and synaptic analysis according to pulse conditions. When we deposited switching layer at lowest power (40 W), more Ag ions move to the switching matrix and make lower operation voltage. But there were some disadvantages, which were worst distribution and higher HRS current, less memory window, nonlinear and rapid increase of potentiation process. Conversely, although the device deposited at high voltage increased the operating voltage, but there are improvements, such as the highest memory window and improved linearity of potentiation. The best sample was conducted the synaptic property measurement, and the device successfully mimicked the biological synaptic property with the good linearity of potentiation and depression, spike-rate dependent plasticity (SRDP) and spike-timing dependent plasticity (STDP) properties.
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COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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