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Effect of cryogenic substrate temperature in RF-biased inductive discharge​

Authors
정진욱
Issue Date
11-Jun-2025
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/214030
Place
DDC(Daejeon Convention Center)
Conference Name
4th International Symposium on the Physics of Semiconductors and Applications
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
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