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Improving Power Transfer Efficiency in Inductively Coupled Plasma via Antenna Impedance Tuning
- Authors
- 정진욱
- Issue Date
- 12-Jun-2025
- Place
- DDC(Daejeon Convention Center)
- Conference Name
- 4th International Symposium on the Physics of Semiconductors and Applications
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)