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극저온 전자 온도 Ar/CF4 플라즈마에서 Si 웨이퍼 식각 특성 연구
- Authors
- 정진욱
- Issue Date
- 21-Aug-2024
- Place
- Sinwha world jeju,korea
- Conference Name
- 제67회 한국진공학회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)