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유도 결합 플라즈마에서 가상 접지와 병렬 공진 효과를 이용한 고효율 플라즈마 발생 연구
- Authors
- 정진욱
- Issue Date
- 21-Aug-2024
- Place
- Sinwha world jeju,korea
- Conference Name
- 제67회 한국진공학회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)