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RF 바이어스 파워가 인가된 유도 결합 아르곤 플라즈마에서 극저온 기판 온도 효과 연구
- Authors
- 정진욱
- Issue Date
- 21-Aug-2024
- Place
- Sinwha world jeju,korea
- Conference Name
- 제67회 한국진공학회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)