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Effects of DC magnetic field on an inductively coupled plasma with a DC biased grid

Authors
정진욱
Issue Date
1-Oct-2024
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/214044
Place
Double Tree by Hilton San Diego Mission Valley, San Diego, California.
Conference Name
77th Gaseous Electronics Conference (2024 GEC)
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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Chung, Chin Wook
COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
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