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Bias waveform adjustment to substrate for mono-energetic ion energy distribution
- Authors
- 정진욱
- Issue Date
- 1-Oct-2024
- Place
- Double Tree by Hilton San Diego Mission Valley, San Diego, California.
- Conference Name
- 77th Gaseous Electronics Conference (2024 GEC)
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)