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Multi-Threshold Voltage(Vth) Engineering Using ALD TaN-Based HKMG Gate Stack for Advanced Logic ang DRAM Devices
- Authors
- 최창환
- Issue Date
- 13-Nov-2025
- Place
- Paradise Hotel Busan
- Conference Name
- Korea International Semiconductor Conference on Manufacturing Technology (KISM)
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)