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Enhancement of Carrier Mobility and Concentration through Hydrogen Plasma Doping: Low-Temperature PEALD Deposition of High Performance TCO Films

Authors
박진성
Issue Date
20-Aug-2025
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/215236
Place
부산 벡스코
Conference Name
IMID2025
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Park, Jinseong
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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