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Structural Design and Performance Evaluation of Phenyl(Alkyl)trimethoxysilanes as Small Molecular Inhibitors for Area-Selective Atomic Layer Deposition of VO₂

Authors
박진성
Issue Date
25-Mar-2025
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/215264
Place
LEIPZIG, GERMANY
Conference Name
AREA SELECTIVE DEPOSITION WORKSHOP 2025
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Park, Jinseong
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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