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SiN 기반 EUV 펠리클 제작을 위한 에칭 공정 최적화
- Authors
- 안진호
- Issue Date
- 15-Feb-2019
- Place
- 강원도 웰리힐리파크
- Conference Name
- The 26th Korean Conference on Semiconductors
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)