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평판형 헬리컬 공진 플라즈마에서 플라즈마 전위 형성 매커니즘

Authors
정진욱
Issue Date
21-Aug-2025
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/218071
Place
Phoenix Island, Jeju, Korea
Conference Name
제69회 한국진공학회
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
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