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Two zone CCP에서 병렬 공진 효과와 전극 임피던스 제어를 이용한 플라즈마 밀도와 균일도 제어 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2026-07-06T07:05:58Z | - |
| dc.date.available | 2026-07-06T07:05:58Z | - |
| dc.date.issued | 2025-08-22 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/218074 | - |
| dc.title | Two zone CCP에서 병렬 공진 효과와 전극 임피던스 제어를 이용한 플라즈마 밀도와 균일도 제어 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제69회 한국진공학회 | - |
| dc.citation.conferencePlace | Phoenix Island, Jeju, Korea | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)