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Two zone CCP에서 병렬 공진 효과와 전극 임피던스 제어를 이용한 플라즈마 밀도와 균일도 제어 연구
- Authors
- 정진욱
- Issue Date
- 22-Aug-2025
- Place
- Phoenix Island, Jeju, Korea
- Conference Name
- 제69회 한국진공학회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)