ScholarWorks@Hanyang University: 2. Conference Papers

2. Conference Papers(서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers)4,848

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Collection's Items (Sorted by Submit Date in Descending order): 1001 to 1020 of 4848

Feasibility of nanometer-thickness molybdenum carbide film for extreme ultraviolet pellicle

ConferenceIssue Date2022Place미국

Experimental demonstration for the influence of EUV pellicle wrinkles on the mask 3D effects

ConferenceIssue Date2022Place미국

Investigation of ZrSi2 for application to EUV pellicle

ConferenceIssue Date2022Place미국

EUV mask technology

ConferenceIssue Date2022Place미국 (온라인 개최)

EUV 펠리클의 열-기계적 물성이 critical dimension uniformity에 미치는 영향

ConferenceIssue Date2022Place수원 컨벤션센터

EUV 펠리클 주름이 M3D effect와 마스크 이미징 성능에 미치는 영향에 대한 실험적 시연

ConferenceIssue Date2022Place수원 컨벤션센터

EUV Phase Shift Mask 위상특성 제어를 통한 마스크 이미징 성능 향상 연구

ConferenceIssue Date2022Place수원 컨벤션센터

Electrical Characteristics of 3D P-I-N Structured 1T DRAM

ConferenceIssue Date2022Place라마다 호텔 제주

EUV Lithography

ConferenceIssue Date2022Place부산 / 온라인 개최

Investigation on the causes of EUV transmittance degradation of EUV pellicle during exposure process

ConferenceIssue Date2022Place일산 KINTEX / 온라인 개최

Effect of wrinkles on EUV pellicle reflectivity and local critical dimension

ConferenceIssue Date2022Place일산 KINTEX / 온라인 개최

Experimental demonstration for the influence of pellicle wrinkles on the mask imaging performance

ConferenceIssue Date2022Place일산 KINTEX / 온라인 개최

Fluorine-based dry etch of platinum tungsten alloy for novel EUV mask absorber

ConferenceIssue Date2022Place일산 KINTEX / 온라인 개최

Evaluating optical/thermal properties of single MoSi2 EUV pellicle

ConferenceIssue Date2022Place일산 KINTEX / 온라인 개최

Impact of thermomechanical properties of EUV pellicle on image performance

ConferenceIssue Date2022Place일산 KINTEX / 온라인 개최

Effect of diffraction phase control for low-n EUV mask

ConferenceIssue Date2022Place일산 KINTEX / 온라인 개최

Hetero Phased Perovskite Growth for Stable Optoelectronic Devices

ConferenceIssue Date2021Place알펜시아리조트

Hetero-Phased Perovskite Light-Emitter for Stable Light-Emitting Diodes

ConferenceIssue Date2021Place제주국제컨벤션센터

Designing of Ultrastrong Lightweight Maraging Steel

ConferenceIssue Date2021Place제주국제컨벤션센터

Effect of Cooling Rates on Microstructure and Mechanical Properties during Beta Heat Treatment of Ti-6Al-4V Alloy for Aerospace

ConferenceIssue Date2021Place제주국제컨벤션센터

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