Characterization of Sputter-Deposited LiZr2(PO4)(3) Thin Film Solid Electrolyte
- Authors
- Kim, Hee-Soo; Choi, Kwang S.; Kim, Eun J.; Kang, Kihun; Kim, Ju H.; Kim, Joosun; Yoon, Chong S.
- Issue Date
- Jul-2015
- Publisher
- ELECTROCHEMICAL SOC INC
- Citation
- JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.162, no.10, pp.A2080 - A2084
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Volume
- 162
- Number
- 10
- Start Page
- A2080
- End Page
- A2084
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/24924
- DOI
- 10.1149/2.0501510jes
- ISSN
- 0013-4651
- Abstract
- 320-nm-thick LiZr2(PO4)(3) thin film was prepared by radio frequency sputtering and thermally annealed up to 1000 degrees C to fully crystallize the as-deposited film. The room-temperature ionic conductivity of the film annealed at 800 degrees C was 1.3 x 10(-7) S/cm which was inferior compared to its bulk counterpart due to the partial crystallization and small grain size; however, at an elevated temperature, the ionic conductivity approached the bulk value, reaching 4.0 x 10(-6) S/cm above 100 degrees C. It was demonstrated that combined with chemical stability of LiZr2(PO4)(3) and low electronic conductivity, the LiZr2(PO4)(3) thin film can be a possible candidate material for a solid electrolyte operating at an elevated temperature. (C) 2015 The Electrochemical Society. All rights reserved.
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