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Physical, Chemical, and Electrical Properties of Molecular Layer Deposited Alucone Thin Films using Trimethyl-aluminum and Hydroquinone
- Authors
- 박진성
- Issue Date
- 1-Aug-2018
- Place
- 대한민국 인천 송도
- Conference Name
- 18th International Conference on Atomic Layer Deposition and Atomic Layer Etching
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)