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Charging Effect of Capacitive Resonant Sensor with Oxide-nitride Layer or Oxide Layer

Authors
박관규
Issue Date
6-Jul-2018
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/27957
Place
Sapporo Convention Center, Sapporo, Japan
Conference Name
International Symposium on Precision Engineering and Sustainable Manufacturing
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서울 공과대학 > 서울 기계공학부 > 2. Conference Papers

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Park, Kwan Kyu
COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)
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