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Multi-Density Structure of Al2O3 as a Moisture Permeation Barrier by Spatial Atomic Layer Deposition at Low Temperature

Authors
전형탁
Issue Date
16-Nov-2017
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/30099
Place
경주 현대호텔
Conference Name
2017학년도 한국재료학회 추계학술대회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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