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Experimental investigation of rf bias power on the plasma density and electron heating in an inductively coupled plasma
- Authors
- 정진욱
- Issue Date
- 7-Nov-2017
- Publisher
- American Physical Society
- Citation
- 70th Annual Gaseous Electronics Conference
- Conference Name
- 70th Annual Gaseous Electronics Conference
- Place
- Pittsburgh, Pennsylvania
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)