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Physical property and Environmental degradation of plasma enhance atomic layer deposited SiNx thin film on low temperature process
- Authors
- 박진성
- Issue Date
- 31-Aug-2017
- Place
- 부산 해운대, BEXCO
- Conference Name
- IMID 2017
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)