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The Influence of NH3 Plasma Treatment on ALD HfO2-IGZO TFTs

Authors
최창환
Issue Date
31-Aug-2017
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/31482
Place
Busan, Korea
Conference Name
International Meeting on Information Display (IMID 2017)
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Choi, Chang hwan
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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