Detailed Information

Cited 7 time in webofscience Cited 7 time in scopus
Metadata Downloads

Contamination Particles and Plasma Etching Behavior of Atmospheric Plasma Sprayed Y₂O₃ and YF₃ Coatings under NF₃ Plasmaopen access

Authors
Song, Je-BoemKim, Jin-TaeOh, Seong-GeunYun, Ju-Young
Issue Date
Feb-2019
Publisher
MDPI
Keywords
yttrium oxide (Y2O3); yttrium oxyfluoride (YOF); yttrium fluoride (YF3); atmospheric plasma spraying (APS); contamination particle; plasma etching; NF3 plasma
Citation
COATINGS, v.9, no.2, pp.1 - 8
Indexed
SCIE
SCOPUS
Journal Title
COATINGS
Volume
9
Number
2
Start Page
1
End Page
8
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/32905
DOI
10.3390/coatings9020102
ISSN
2079-6412
Abstract
Yttrium oxide (Y2O3) and yttrium oxyfluoride (YO0.6F2.1) protective coatings were prepared by an atmospheric plasma spraying technique. The coatings were exposed to a NF3 plasma. After the NF3 plasma treatment, the mass loss of the coatings showed that the etching rate of YO0.6F2.1 was larger than that of the Y2O3. X-ray photoelectron spectroscopy revealed that YO0.5F1.9 was present in the Y2O3 coating, whereas YO0.4F2.2 was present in the YO0.6F2.1 coating. Transmission electron microscope analysis conducted on contamination particles generated during the plasma etching showed that both coatings were mainly composed of YFx. The contamination particles estimated by in-situ particle monitoring sensor revealed that the YO0.6F2.1 compared with the Y2O3 coatings produced 65% fewer contamination particles.
Files in This Item
Appears in
Collections
서울 공과대학 > 서울 화학공학과 > 1. Journal Articles

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Oh, Seong-Geun photo

Oh, Seong-Geun
COLLEGE OF ENGINEERING (DEPARTMENT OF CHEMICAL ENGINEERING)
Read more

Altmetrics

Total Views & Downloads

BROWSE