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Thermal Budget이 향상된 열처리 시스템을 이용한 IGZO 박막의 열처리 특성 비교
- Authors
- 안진호
- Issue Date
- 14-Feb-2017
- Place
- 강원도 대명비발디파크 메이플동 2층/3층
- Conference Name
- The 24th Korean Conference on Semiconductors
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)