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A New Nonlinear Parameter Estimation and Its Application to Critical Dimension Measurements in a Semiconductor Industry
- Authors
- 박철진
- Issue Date
- 16-Dec-2016
- Place
- International Conference Room, Building 25-1, Seoul National University
- Conference Name
- The 2nd Pacific Rim Statistical Conference for Production Engineering Production Engineering, Big Data & Statistics
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Collections - 서울 공과대학 > 서울 산업공학과 > 2. Conference Papers
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Related Researcher
- Park, Chuljin
- COLLEGE OF ENGINEERING (DEPARTMENT OF INDUSTRIAL ENGINEERING)