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A Compact Hollow-Anode Discharge Source for Sputtering Processes
- Authors
- 정규선
- Issue Date
- 28-Sep-2016
- Publisher
- 한국재료학회
- Citation
- The 6th International Conference on Microelectronics and Plasma Technology
- Conference Name
- The 6th International Conference on Microelectronics and Plasma Technology
- Place
- Dream Center, Gyeongju, in Korea
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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